TESCAN Mira3 XMH scanning electron microscope
The TESCAN MIRA3 is a high-performance scanning electron microscope system which provides high resolution and low-noise imaging.
The microscope is fitted with fast EBSD and EDX detectors for high resolution, large area materials characterisation.

The instrument is equipped with a full range of detectors for multi-scale characterisation of samples.
- secondary electron detector (SE) sensitive to sample’s topography changes.
- backscattered-electron detector (BSE) which provides imaging that carries information on the sample’s composition.
- energy-dispersive x-ray (EDX) allowing chemical characterisation of materials.
- electron backscatter diffraction detector (EBSD) for microstructural-crystallographic characterisation of samples.
Applications
- high resolution microscopy
- grain size analysis
- post corrosion studies
- porosity measurements
- chemical composition (±1 at%)
Technical Specification
- high brightness Field Emission Gun (Schottky emitter) for high-resolution/ high current/ low-noise imaging (up to 70nA of beam current)
- resolution up to 1.2nm at 30kV
- Oxford Instruments X-Max 80 EDX detector (can detect elemental composition including Be)
- Oxford Instruments Symmetry 2 EBSD detector (up to 4500 patterns per second acquisition)
- sample holders for Transmission Kikuchi Diffraction (TKD)


